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실리콘 박막분리를 위한 표면기포 형성 방법

Author

변영태; 김형권; 우형주; 김선호; 우덕하

Assignee

한국과학기술연구원

Regitration Date

2005-12-22

Registration No.

0539465

Application Date

2004-03-09

Application No.

2004-0015790

Country

KO

URI

https://pubs.kist.re.kr/handle/201004/93249

Appears in Collections:

KIST Patent > 2004

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