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dc.contributor.author민석기-
dc.contributor.author박승철-
dc.contributor.author심광보-
dc.contributor.author박용주-
dc.contributor.author한철원-
dc.date.accessioned2024-01-12T18:32:54Z-
dc.date.available2024-01-12T18:32:54Z-
dc.date.issued1993-09-09-
dc.identifier.urihttps://pubs.kist.re.kr/handle/201004/93755-
dc.title디렉트　모니터링　전기로를　이용한　수직온도　구배　냉각　화합물　반도체 단결정　성장장치-
dc.typePatent-
dc.date.registration1993-09-09-
dc.date.application1990-04-04-
dc.identifier.patentRegistrationNumber65323-
dc.identifier.patentApplicationNumber90-4653-
dc.publisher.countryKO-
dc.type.iprs특허-
dc.contributor.assignee한국과학기술연구원-
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