디렉트 모니터링 전기로를 이용한 수직온도 구배 냉각 화합물 반도체 단결정 성장장치

Author
민석기박승철심광보박용주한철원
Assignee
한국과학기술연구원
Regitration Date
1993-09-09
Registration No.
65323
Application Date
1990-04-04
Application No.
90-4653
Country
KO
URI
https://pubs.kist.re.kr/handle/201004/93755
Appears in Collections:
KIST Patent > Others
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