KIST Library Institutional Repository

텡스텐　질화박막을　베리어　메탈로　이용한　실리콘　반도체　소자의　알루미늄금속배선　형성　방법

Author

김용태; 민석기

Assignee

한국과학기술연구원

Regitration Date

1995-09-20

Registration No.

89415

Application Date

1992-05-16

Application No.

92-8319

Country

KO

URI

https://pubs.kist.re.kr/handle/201004/93762

Appears in Collections:

KIST Patent > Others

Files in This Item:

There are no files associated with this item.

Export

RIS (EndNote)

XLS (Excel)

XML