KIST Library Institutional Repository

질소플라즈마를　이용한　선택적　금속 박막　증착방법　및　그를　이용한　다층금속　연결배선　방법

Author

민석기; 곽성관; 김영석; 김은규

Assignee

한국과학기술연구원

Regitration Date

2001-01-11

Registration No.

286253

Application Date

1998-03-12

Application No.

98-8282

Country

KO

URI

https://pubs.kist.re.kr/handle/201004/94174

Appears in Collections:

KIST Patent > Others

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