실리콘 박막을 이용한 유리 기판쌍의정전 열접합 방법

Author
주병권오명환최우범
Assignee
한국과학기술연구원
Regitration Date
2001-03-06
Registration No.
6,197,139
Application Date
1999-01-08
Application No.
09/226,949
Country
US
URI
https://pubs.kist.re.kr/handle/201004/94179
Appears in Collections:
KIST Patent > Others
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