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dc.contributor.authorKim Yong Soo-
dc.contributor.authorSung Hamin-
dc.contributor.authorKim Young Jin-
dc.contributor.authorCho, Woon Jo-
dc.contributor.author이주한-
dc.contributor.authorKim, Yong Tae-
dc.contributor.authorJhon, Young Min-
dc.date.accessioned2024-01-12T19:04:12Z-
dc.date.available2024-01-12T19:04:12Z-
dc.date.created2021-09-29-
dc.identifier.urihttps://pubs.kist.re.kr/handle/201004/94396-
dc.languageEnglish-
dc.subjectZrN/Si Thin Films-
dc.subjectnull-
dc.subjectEUV Mirror-
dc.subjectnull-
dc.subjectMo/Si Thin Films-
dc.subjectnull-
dc.subjectInterdiffusion Layers-
dc.titleDesign of EUV Mirror Using ZrN/Si Thin Films-
dc.title.alternativeZrN/Si 박막을 이용한 EUV용 반사경의 설계-
dc.typeConference-
dc.description.journalClass2-
dc.identifier.bibliographicCitation차세대 리소그래피 학술대회, v.2, pp.51 - 52-
dc.citation.title차세대 리소그래피 학술대회-
dc.citation.volume2-
dc.citation.startPage51-
dc.citation.endPage52-
dc.citation.conferencePlaceKO-
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