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Design of EUV Mirror Using ZrN/Si Thin Films

Other Titles

ZrN/Si 박막을 이용한 EUV용 반사경의 설계

Authors

Kim Yong Soo; Sung Hamin; Kim Young Jin; Cho, Woon Jo; 이주한; Kim, Yong Tae; Jhon, Young Min

Citation

차세대 리소그래피 학술대회, v.2, pp.51 - 52

Keywords

ZrN/Si Thin Films; EUV Mirror; Mo/Si Thin Films; Interdiffusion Layers

URI

https://pubs.kist.re.kr/handle/201004/94396

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KIST Conference Paper > Others

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