복층 구조의 적외선 흡수체를 포함하는 마이크로-볼로미터 및 이의 제조방법

Author
최원준이혜진백정민백승협
Assignee
한국과학기술연구원
Regitration Date
2021-07-05
Registration No.
10-2275391
Application Date
2019-08-23
Application No.
10-2019-0103712
Country
KO
URI
https://pubs.kist.re.kr/handle/201004/94718
Appears in Collections:
KIST Patent > 2019
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