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dc.contributor.author김태하-
dc.contributor.author전명석-
dc.date.accessioned2024-01-12T20:32:48Z-
dc.date.available2024-01-12T20:32:48Z-
dc.date.issued2011-09-27-
dc.identifier.urihttps://pubs.kist.re.kr/handle/201004/95995-
dc.title다결정 실리콘 층에 의해 광 차단판이 형성된 유리 재질 마이크로 칩의 MEMS 가공 제작-
dc.typePatent-
dc.date.registration2011-09-27-
dc.date.application2007-10-29-
dc.identifier.patentRegistrationNumber8025776-
dc.identifier.patentApplicationNumber11/926509-
dc.publisher.countryUS-
dc.type.iprs특허-
dc.contributor.assignee한국과학기술연구원-
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KIST Patent > 2007
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