KIST Library Institutional Repository

경사구조 프로브 팁을 이용한 반도체 검사장치 제조방법

Author

신현준; 문성욱

Assignee

한국과학기술연구원

Regitration Date

2006-11-30

Registration No.

0654760

Application Date

2004-10-13

Application No.

2004-0081903

Country

KO

URI

https://pubs.kist.re.kr/handle/201004/96095

Appears in Collections:

KIST Patent > 2004

Files in This Item:

There are no files associated with this item.

Export

RIS (EndNote)

XLS (Excel)

XML