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dc.contributor.authorJihye Jang-
dc.contributor.authorKim jin sik-
dc.contributor.authorDongHoon Kang-
dc.contributor.authorLee Sang Youp-
dc.contributor.author박정호-
dc.contributor.authorShin, Hyun Joon-
dc.date.accessioned2024-01-12T20:35:07Z-
dc.date.available2024-01-12T20:35:07Z-
dc.date.created2021-09-29-
dc.identifier.urihttps://pubs.kist.re.kr/handle/201004/96149-
dc.languageEnglish-
dc.subjectnanofabrication-
dc.subjectnanowire device-
dc.subjectinsulator film-
dc.subjectSiO2-Si3N4-SiO2 layers-
dc.subjectPECVD-
dc.titleDesign of nano-device using hi ghly stable insulator film-
dc.title.alternative높은 안정성의 절연막을 이용한 nano-device 설계-
dc.typeConference-
dc.description.journalClass2-
dc.identifier.bibliographicCitation제14회 한국 MEMS 학술대회, pp.249 - 250-
dc.citation.title제14회 한국 MEMS 학술대회-
dc.citation.startPage249-
dc.citation.endPage250-
dc.citation.conferencePlaceKO-
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