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Design of nano-device using hi ghly stable insulator film

Other Titles

높은 안정성의 절연막을 이용한 nano-device 설계

Authors

Jihye Jang; Kim jin sik; DongHoon Kang; Lee Sang Youp; 박정호; Shin, Hyun Joon

Citation

제14회 한국 MEMS 학술대회, pp.249 - 250

Keywords

nanofabrication; nanowire device; insulator film; SiO2-Si3N4-SiO2 layers; PECVD

URI

https://pubs.kist.re.kr/handle/201004/96149

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KIST Conference Paper > Others

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