DSpace at KISTKIST PatentOthers

Full metadata record

DC Field Value Language
dc.contributor.author민석기-
dc.contributor.author김성일-
dc.contributor.author김무성-
dc.date.accessioned2024-01-12T21:30:41Z-
dc.date.available2024-01-12T21:30:41Z-
dc.date.issued1999-02-02-
dc.identifier.urihttps://pubs.kist.re.kr/handle/201004/96971-
dc.titleCBr4개스를　이용한　반도체　패턴　측면의　에피성장율　조절방법-
dc.typePatent-
dc.date.registration1999-02-02-
dc.date.application1996-07-22-
dc.identifier.patentRegistrationNumber5,865,888-
dc.identifier.patentApplicationNumber08/684,721-
dc.publisher.countryUS-
dc.type.iprs특허-
dc.contributor.assignee한국과학기술연구원-
Appears in Collections:
KIST Patent > Others
Files in This Item:
There are no files associated with this item.
Export
RIS (EndNote)
XLS (Excel)
XML
Show Simple Item Record

qrcode

Items in DSpace are protected by copyright, with all rights reserved, unless otherwise indicated.

BROWSE