CBr4개스를 이용한 반도체 패턴 측면의 에피성장율 조절방법

Author
민석기김성일김무성
Assignee
한국과학기술연구원
Regitration Date
1999-02-02
Registration No.
5,865,888
Application Date
1996-07-22
Application No.
08/684,721
Country
US
URI
https://pubs.kist.re.kr/handle/201004/96971
Appears in Collections:
KIST Patent > Others
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