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합성　다이아몬드　웨이퍼의　평탄화　및연마　방법

Author

유명기; 백영준; 김기수

Assignee

한국과학기술연구원

Regitration Date

2002-11-28

Registration No.

364134

Application Date

1999-09-21

Application No.

99-40684

Country

KO

URI

https://pubs.kist.re.kr/handle/201004/97085

Appears in Collections:

KIST Patent > Others

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