DSpace at KISTKIST Patent2020

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dc.contributor.author이도권-
dc.contributor.author김진환-
dc.contributor.author강상웅-
dc.contributor.author김인호-
dc.contributor.author장윤희-
dc.date.accessioned2024-01-12T21:33:24Z-
dc.date.available2024-01-12T21:33:24Z-
dc.date.issued2023-07-10-
dc.identifier.urihttps://pubs.kist.re.kr/handle/201004/97168-
dc.title물리적 기상증착 장치용 기판 홀더-
dc.typePatent-
dc.date.registration2023-07-10-
dc.date.application2020-11-26-
dc.identifier.patentRegistrationNumber10-2555324-
dc.identifier.patentApplicationNumber10-2020-0161032-
dc.publisher.countryKO-
dc.type.iprs특허-
dc.contributor.assignee한국과학기술연구원-
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KIST Patent > 2020
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