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물리적 기상증착 장치용 기판 홀더

Author

이도권; 김진환; 강상웅; 김인호; 장윤희

Assignee

한국과학기술연구원

Regitration Date

2023-07-10

Registration No.

10-2555324

Application Date

2020-11-26

Application No.

10-2020-0161032

Country

KO

URI

https://pubs.kist.re.kr/handle/201004/97168

Appears in Collections:

KIST Patent > 2020

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