KIST Library Institutional Repository

Crystallization of BST Thin Film by Excimer Laser Annealing Method for Embedded Capacitors

Authors

Kang Min Gyu; Do Young Ho; Oh Seung min; KANG, CHONG YUN; Sahn Nahm; YOON, SEOK JIN

Citation

2011 MRS SPRING MEETING

Keywords

Excimer laser annealing; BST; thin film; low temperature

URI

https://pubs.kist.re.kr/handle/201004/97495

Appears in Collections:

KIST Conference Paper > Others

Files in This Item:

There are no files associated with this item.

Export

RIS (EndNote)

XLS (Excel)

XML