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희생적 식각 마스크를 이용한 나노 구조물 제조방법

Author

하승규; 김수연; 송진동; 최원준; 한일기

Assignee

한국과학기술연구원

Regitration Date

2014-11-25

Registration No.

8895412

Application Date

2012-11-05

Application No.

13/668526

Country

US

URI

https://pubs.kist.re.kr/handle/201004/98645

Appears in Collections:

KIST Patent > 2012

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