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반도체 제조 장비용 열용사 코팅물질, 그 제조방법 및 코팅방법

Author

석현광; 백경호; 이해원

Assignee

한국과학기술연구원

Regitration Date

2010-01-21

Registration No.

10-0939256

Application Date

2007-06-20

Application No.

10-2007-0060758

Country

KO

URI

https://pubs.kist.re.kr/handle/201004/99213

Appears in Collections:

KIST Patent > 2007

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