KIST Library Institutional Repository

실리콘막의　두께　조절방법　및　장치

Author

주병권; 오명환

Assignee

한국과학기술연구원

Regitration Date

1996-05-15

Registration No.

99526

Application Date

1992-09-08

Application No.

92-16394

Country

KO

URI

https://pubs.kist.re.kr/handle/201004/99826

Appears in Collections:

KIST Patent > Others

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