DSpace at KISTKIST PatentOthers

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dc.contributor.author이욱성-
dc.contributor.author은광용-
dc.contributor.author백영준-
dc.date.accessioned2024-01-13T00:01:24Z-
dc.date.available2024-01-13T00:01:24Z-
dc.date.issued1995-12-19-
dc.identifier.urihttps://pubs.kist.re.kr/handle/201004/99857-
dc.title고밀도　직류글로우　방전에　의한　다이아몬드막　증착방법-
dc.typePatent-
dc.date.registration1995-12-19-
dc.date.application1994-11-25-
dc.identifier.patentRegistrationNumber5,476,693-
dc.identifier.patentApplicationNumber08/348,110-
dc.publisher.countryUS-
dc.type.iprs특허-
dc.contributor.assignee한국과학기술연구원-
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