고밀도 직류글로우 방전에 의한 다이아몬드막 증착방법

Author
이욱성은광용백영준
Assignee
한국과학기술연구원
Regitration Date
1995-12-19
Registration No.
5,476,693
Application Date
1994-11-25
Application No.
08/348,110
Country
US
URI
https://pubs.kist.re.kr/handle/201004/99857
Appears in Collections:
KIST Patent > Others
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