강도 및 전기적 물성이 개선된 세라믹스 증착용기 및 그의 제조방법

Author
한경섭배동식이승용박상환정무수
Assignee
한국과학기술연구원
Regitration Date
1997-10-01
Registration No.
0125016
Application Date
1995-02-22
Application No.
1995-0003400
Country
KO
URI
https://pubs.kist.re.kr/handle/201004/99874
Appears in Collections:
KIST Patent > Others
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