| 2001-12 | A gas cluster ion beam accelerator | 송재훈; 최덕균; 최원국 |
| 1999-11 | A self-ion assisted beam (SIAB) source based upon Unvala electron beam scheme | 최원국; 송재훈; 김기한; 최성창; 이충만; 송종한; 정형진 |
| 2003-02 | Application of nano-cluster ion beam to surface smoothening, etching, and ultra-shallow junction formation. | 송재훈; 최원국 |
| 2001-09 | Assessment of an ionized Co ₂ gas cluster accelerator. | 송재훈; 권순남; 최덕균; 최원국 |
| 2002-11 | Dependence of surface smoothing, sputtering and etching phenomena on cluster ion dosage | 송재훈; 최덕균; 최원국 |
| 1999-05 | Design of self-ion assisted beam source (SIAB) based on electron focusing with concentric symmetrical electric field and Cu thin film growth by SIAB | 송재훈; 김기환; 이충만; 최성창; 송종한; 정형진; 최원국 |
| 2000-11 | Effect of ultra-thin catalyst deposited upon In2O3 thin film on CO sensitivity | 이혜정; 송재훈; 권순남; 김태송; 김광주; 정형진; 최원국 |
| 2001-10 | Enhancement of CO sensitivity of indium oxide-based semiconductor gas sensor through ultra-thin cobalt adsorption | 이혜정; 송재훈; 윤영수; 김태송; 김광주; 최원국 |
| 2001-10 | Enhancement of photoluminescence and electrical properties of Ga-doped ZnO thin film grown on α -Al ₂ O ₃ (0001) single-crystal subastrate by rf magnetron sputtering through rapid thermal annealin | 조정; 나종범; 오민석; 송재훈; 윤기현; 정형진; 최원국 |
| 2000-09 | Epitaxial growth of La-Ca-Mn-O thin film on out-of-plane twinned LaAIO₃ | 송재훈; K. K. Kim; 오영제; 정형진; 최원국; 송종한; 최덕균 |
| 2003-06 | Formation and characterizations of ultra-shallow p+-n junctions using B10H14 ion implantation | 전기영; 김지수; 황정남; 임성일; 송종한; 송재훈; 최원국; 김현경 |
| 2002-07 | Gas cluster ion source for etching and smoothing of solid surfaces. | 송재훈; 최덕균; 최원국 |
| 2002-11 | Indium tin oxide surface smoothing by gas cluster ion beam | 송재훈; 최덕균; 최원국 |
| 1999-01 | Influence of crystallinity and oxygen content of ZnO thin film deposited by RF magnetron sputtering on photoluminescence. | 송재훈; 김경국; 정형진; 최원국 |
| 2002-05 | Isolated cluster ion impact on solid surfaces HOPG, Si and Cu(TiO ₂ )/Si surfaces | 송재훈; 최원국 |
| 1999-05 | (La,Ca)MnO3/LaAlO3 (100) 박막의 결정성장 분석 | 송재훈; 송종한; 최덕균; 오영제; 최원국 |
| 2000-08 | La-Ca-Mn-O thin film based thermistor for measuring low temperature of 77-230 K | 송재훈; 김경국; 정형진; 최덕균; 최원국 |
| 2000-11 | Photoluminescence and heteroepitaxy of ZnO on aspphire substrate (0001) grown by rf magnetron sputtering | 김경국; 송재훈; 정형진; 최원국; 박성주; 송종한; 이정용 |
| 2003-10 | Surface smoothing and etching by gas cluster ion beam | 송재훈; 최원국 |
| 1999-01 | The effect of initial Pd catalyst oxidation state on CH4 sensitivity of SnO2 thin film sensor | 최원국; 조정; 조준식; 송재훈; 정형진; 고석근 |
| 2000-04 | The grain size effects on the photoluminescence of ZnO/α-AI2O3 grown by Radio-Frequency magnetron sputtering | 김경국; 송재훈; 정형진; 최원국; 박성주; 송종한 |
| 2001-02 | Twinned LaAlO₃ substrate effect on epitaxially grown La-Ca-Mn-O thin film crystalline structure | 송재훈; 김경국; 오영제; 정형진; 송종한; 최덕균; 최원국 |
| 2001-01-20 | 가스 클러스터 이온 가속기를 이용한 나노 구조물 형성 방법 | 권순남; 송재훈; 송종한; 정형진; 최원국; 황정남 |
| 2001-10-25 | 가스 클러스터 이온빔을 이용한 아이.티.오 박막 표면처리시스템 및 그 방법 | 송재훈; 오희범; 윤덕주; 정형진; 최원국 |
| 2000-01-27 | 저온 측온 저항계용 박막 및 그의 제조방법 | 송재훈; 오영제; 윤영수; 정형진; 최원국 |
