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The effect of initial Pd catalyst oxidation state on CH4 sensitivity of SnO2 thin film sensor

Other Titles

Pd 촉매의 부분 산화 조절을 이용한 SnO2 박막 센서의 CH4 감도 변화 연구

Authors

최원국; 조정; 조준식; 송재훈; 정형진; 고석근

Issue Date

1999-01

Publisher

한국마이크로전자 및 패키징학회

Citation

마이크로전자 및 패키징학회지 = Journal of Microelectronics and Packaging Society, v.6, no.2, pp.45 - 49

Keywords

Pd catalyst; partial oxidation; chemical sensitization; electronic sensitization; x-ray phototelectron spectrosocpy; CH₄ gas sensitivity

ISSN

1226-9360

URI

https://pubs.kist.re.kr/handle/201004/142464

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KIST Article > Others

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