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동심원형 대칭 전기장 집속 방식을 응용한 자가 이온 보조 소스 제작 및 Cu 박막 증착

Other Titles

Design of self-ion assisted beam source (SIAB) based on electron focusing with concentric symmetrical electric field and Cu thin film growth by SIAB

Authors

송재훈; 김기환; 이충만; 최성창; 송종한; 정형진; 최원국

Issue Date

1999-05

Publisher

한국진공학회

Citation

한국진공학회지, v.8, no.2, pp.121 - 126

Keywords

self-ion assisted beam source; unvala scheme; electrostatic focusing; Cu thin film

ISSN

1225-8822

URI

https://pubs.kist.re.kr/handle/201004/142209

Appears in Collections:

KIST Article > Others

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