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Showing results 1 to 5 of 5

Issue DateTitleAuthor(s)
-Deposition of aluminum nitride thin film by MOCVD using AlCl₃ : BuNH₂ single source precursorHAN SUNG HAN; 안창규; 최승철
-MOCVD deposition of AlN thin film for packaging materials안창규; 최승철; CHO SEONG HOON; HAN SUNG HAN; 경제홍
2001-08Preparation of AIN thin film with new type of single precursor안창규; 최승철; 한성환
-Single precursor MOCVD of AlN thin films & the stoichiometry controlling안창규; 경제홍; CHO SEONG HOON; HAN SUNG HAN; 최승철; Je-Hong Kyoung
-The synthesis of a suitable single precursor for AIN thin filmsHAN SUNG HAN; 안창규; 경제홍; CHO SEONG HOON; 최승철
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