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The synthesis of a suitable single precursor for AIN thin films

Other Titles

AIN thin films을 위한 적합한 단일 전구체 합성

Authors

HAN SUNG HAN; 안창규; 경제홍; CHO SEONG HOON; 최승철

Citation

2000 년 춘계 마이크로전자페키징학회, pp.?

Keywords

AIN; MOCVD; single precursor

URI

https://pubs.kist.re.kr/handle/201004/108427

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KIST Conference Paper > Others

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