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Showing results 1 to 5 of 5

Issue DateTitleAuthor(s)
1994-02Fabrication and characterization of silicon devices for flow measurement (II)주병권; 고창기; 김철주; 차균현; 오명환
1994-04Fabrication of a Humidity Sensing Device using Silicon Thermopile김태윤; 주병권; 오명환; 박정호
-Fabrication of micromechanical structures for integrated IR sensor applicationJu Byeong Kwon; 박재석; CHUNG MOONKYO; Sang-Seop Yom; SUH SANG HEE; 장진; OH MYUNG HWAN
1994-02-01FABRICATION OF SILICON MEMBRANE USING FUSION BONDING AND 2-STEP ELECTROCHEMICAL ETCH-STOPPINGJU, BK; OH, MH; TCHAH, KH
1994-10Formation of silicon diaphragm using silicon-wafer direct bonding / electrochemical etch-stopping and its application to silicon pressure sensor fabrication주병권; 하병주; 김근섭; 송만호; 김성환; 김철주; 차균현; 오명환
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