KIST Library Institutional Repository

Fabrication and characterization of silicon devices for flow measurement (II)

Other Titles

흐름측정용 실리콘 소자의 제작 및 특성 평가 (II)

Authors

주병권; 고창기; 김철주; 차균현; 오명환

Issue Date

1994-02

Publisher

한국센서학회

Citation

센서학회지, v.3, no.1, pp.12 - 18

Keywords

MEMS; micromachining; micromechanical structure; flow sensor

ISSN

1225-5475

URI

https://pubs.kist.re.kr/handle/201004/145638

Appears in Collections:

KIST Article > Others

Files in This Item:

There are no files associated with this item.

Export

RIS (EndNote)

XLS (Excel)

XML