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Fabrication of a Humidity Sensing Device using Silicon Thermopile

Other Titles

실리콘 Thermopile을 이용한 감습 소자의 제작

Authors

김태윤; 주병권; 오명환; 박정호

Issue Date

1994-04

Citation

전자공학회논문지, v.31A, no.4, pp.70 - 76

Keywords

MEMS; micromachining; micromechanical structure; flow sensor

URI

https://pubs.kist.re.kr/handle/201004/145608

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KIST Article > Others

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