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Formation of silicon diaphragm using silicon-wafer direct bonding / electrochemical etch-stopping and its application to silicon pressure sensor fabrication

Other Titles

실리콘 직접 접합 / 전기화학적 식각정지를 이용한 실리콘 다이아프램의 형성과 실리콘 압력센서 제조에의 응용

Authors

주병권; 하병주; 김근섭; 송만호; 김성환; 김철주; 차균현; 오명환

Issue Date

1994-10

Publisher

한국센서학회

Citation

센서학회지, v.3, no.3, pp.45 - 53

Keywords

MEMS; micromachining; wafer bonding; electrochemical etch stop; micromechanical structure; pressure sensor

ISSN

1225-5475

URI

https://pubs.kist.re.kr/handle/201004/145490

Appears in Collections:

KIST Article > Others

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