Showing results 1 to 5 of 5
Issue Date | Title | Author(s) |
---|---|---|
1994-02 | Fabrication and characterization of silicon devices for flow measurement (II) | 주병권; 고창기; 김철주; 차균현; 오명환 |
1994-04 | Fabrication of a Humidity Sensing Device using Silicon Thermopile | 김태윤; 주병권; 오명환; 박정호 |
- | Fabrication of micromechanical structures for integrated IR sensor application | Ju Byeong Kwon; 박재석; CHUNG MOONKYO; Sang-Seop Yom; SUH SANG HEE; 장진; OH MYUNG HWAN |
1994-02-01 | FABRICATION OF SILICON MEMBRANE USING FUSION BONDING AND 2-STEP ELECTROCHEMICAL ETCH-STOPPING | JU, BK; OH, MH; TCHAH, KH |
1994-10 | Formation of silicon diaphragm using silicon-wafer direct bonding / electrochemical etch-stopping and its application to silicon pressure sensor fabrication | 주병권; 하병주; 김근섭; 송만호; 김성환; 김철주; 차균현; 오명환 |