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Characterization of interface between amorphous Ge2Sb2Te5 and TiN by x-ray photoelectron spectroscopy

Authors

Jeong, Doo Seok; Lee Suyoun; Jeung-hyun Jeong; CHEONG, BYUNG KI; Cheol Seong Hwang

Citation

European|Phase Change and Ovonics Symposium 2009, pp.176 - 180

Keywords

chalcogenice; x-ray photoelectron spectroscopy; interfacial dipole layer; Ge2Sb2Te5

URI

https://pubs.kist.re.kr/handle/201004/101158

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KIST Conference Paper > Others

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