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Reliability modeling of MEMS probe card with vertical guide

Authors

Bong-Hwan Kim; Sewan Park; Kyuhwan Jung; Na, Kyounghwan; Yoon, Eui Sung

Citation

The 24th International Technical Conference on Circuits/Systems, Computers and Communications

Keywords

MEMS; probe card; modeling; tribology; wear; contact resistance

URI

https://pubs.kist.re.kr/handle/201004/101260

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KIST Conference Paper > Others

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