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Microstructure alanysis of In-Sb-Te thin films deposited by RF magnetron sputtering

Authors

Kim Chung Soo; Eun Tae Kim; Jeong Yong Lee; Kim, Yong Tae

Citation

The 14th International Symposium on the Physics of Semiconductor and Application (ISPSA), pp.309

Keywords

In-Sb-Te (IST); In3SbTe2; phase change; chalcogenide; TEM

URI

https://pubs.kist.re.kr/handle/201004/101931

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KIST Conference Paper > Others

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