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Fabrication of Metal Nano Dot Dry Etching Mask Using Block Copolymer Thin Film

Authors

Kang Gil Bum; Kim, Seong Il; Kim, Yong Tae; Lee Chang Woo

Citation

NANO KOREA 2007, pp.272

Keywords

Metal nanodot; copolymer lithography; Reactive ion etching

URI

https://pubs.kist.re.kr/handle/201004/103455

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KIST Conference Paper > Others

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