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Controlling the Different Size of Nanoscale Holes

Authors

Kim, Seong Il; Kang Gil Bum; Kim, Yong Tae; Lee Chang Woo

Citation

The International Conference on Electrical Engineering 2007

Keywords

Diblock Copolymer; CopolymerLithography; Reactive Ion Etching; Nanotemplate

URI

https://pubs.kist.re.kr/handle/201004/103475

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KIST Conference Paper > Others

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