KIST Library Institutional Repository

Investigation into the Recrystallization Phenomena of Cu Damascene Line

Authors

Kim Dong-Ik; Hyo-Jong Lee; Kyu Hwan Oh; Hu-Chul Lee

Citation

16th International Microscopy Congress

Keywords

Cu; interconnect; damascene; EBSD; recrystallization

URI

https://pubs.kist.re.kr/handle/201004/103749

Appears in Collections:

KIST Conference Paper > Others

Files in This Item:

There are no files associated with this item.

Export

RIS (EndNote)

XLS (Excel)

XML