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Other Titles

RF 마이크로플라즈마를 이용한 카본의 증착 및 형태변화에 관한 고찰

Authors

Ko, Hyun Chang; Yeo, Yeong-Koo; LEE, HWA UNG; Song, Hyung Keun

Citation

한국화학공학회 춘계학술대회

Keywords

RF 마이크로플라즈마; 카본; 증착

URI

https://pubs.kist.re.kr/handle/201004/104033

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KIST Conference Paper > Others

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