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Hardness and thermal stbility of c-TiAlN/a-Si3N4 nanoscale multilayered film

Other Titles

결정질-TiAlN/비정질-Si3N4 나노 다층막의 경도 및 열적 안정성

Authors

JONG-KEUK, PARK; Baik, Young Joon

Citation

2006년도 한국표면공학회 춘계 학술발표회

URI

https://pubs.kist.re.kr/handle/201004/104068

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KIST Conference Paper > Others

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