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Fabrication and Mechanical Characterization of MEMS Based Vertical Probe Tips for Measurements of Micro Pads

Authors

Ryu, Jaewook; Kim, Jin Hyeck; Chu sung il; Moon, Sung Wook

Citation

Microprocesses and Nanotechnology 2006, pp.340 - 341

URI

https://pubs.kist.re.kr/handle/201004/104104

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KIST Conference Paper > Others

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