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Lattice distortion of transparent conductive AlGaZnO thin films prepared by RF magnetron sputtering

Other Titles

RF 스퍼터링으로 제조된 AlGaZnO 투명전도성 산화물 박막의 격자변형

Authors

Kim Tae-hoon; Shin Sang-Hoon; Kim In-ho; KIM, WON MOK; Lee, Jeon Kook

Citation

International Conference on Electroceramics

Keywords

AlGaZnO; Transparent Conductive Oxide; Co-sputtering; Lattice distortion; electrtical resistivity

URI

https://pubs.kist.re.kr/handle/201004/104545

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KIST Conference Paper > Others

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