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DIAMOND-LIKE CARBON THIN FILMS OBTAINED FROM MONOENERGETIC FULLERENE C60 ION BEAM

Authors

V.E. Pukha; A.N. Stetsenko; S.N. Dub; Lee, Joong Kee

Citation

ISE2005, pp.763

Keywords

DLC; film; fullerene; C60; ion beam

URI

https://pubs.kist.re.kr/handle/201004/104864

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KIST Conference Paper > Others

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