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Tribological Properties of Adsorbed Water Layer on Silicon Surfaces with Different Hydrophilicity under Various Humid Environments

Authors

Kim, Doo In; Ahn, Hyo-Sok

Citation

Int.Conf. on Metallurgical Coatings and thin Films, pp.20

Keywords

microsystem; humidity; adsorption layer; capillary force; shear stress

URI

https://pubs.kist.re.kr/handle/201004/106032

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KIST Conference Paper > Others

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