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Fabrication of flexible FBAR using thin silicon wafer.

Other Titles

박막 실리콘 웨이퍼를 이용한 압전박막공진기 제작 =

Authors

김용국; 배용환; 강유리; Kim Jai Kyeong; KIM SOO WON; Ju Byeong Kwon

Citation

한국 MEMS 학술대회, pp.380 - 383

Keywords

FBAR; thin wafer; MEMS; piezoelectric effect

URI

https://pubs.kist.re.kr/handle/201004/106362

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KIST Conference Paper > Others

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