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Film bulk acoustic wave resonator using surface micromachining.

Other Titles

표면 마이크로머시닝을 이용한 압전 박막 공진기 제작 =

Authors

KIM IN TAY; 박윤권; 이시형; 이수현; LEE YUN HI; Lee Jeon Kook; 김남수; Ju Byeong Kwon

Citation

한국전기전자재료학회 2002 년도 하계학술대회 논문집, v.3, no.1, pp.156 - 159

Keywords

FBAR; piezoelectric; surface micromachining

URI

https://pubs.kist.re.kr/handle/201004/106824

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KIST Conference Paper > Others

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