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Fabrication of high aspect ratio metallic structures for optical devices using UV-LIGA process.

Other Titles

광소자 응용을 위한 UV-LIGA 공정 기반의 MEMS 소자 제작 =

Authors

KANG HO KWAN; 채경수; Moon Sung Wook; OH MYUNG HWAN

Citation

전기전자재료학회 하계학술대회 논문집, v.v. 3, pp.1050 - 1053.

Keywords

MEMS

URI

https://pubs.kist.re.kr/handle/201004/106834

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KIST Conference Paper > Others

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